ULVAC爱发科 水晶振荡式成膜控制器 CRTM-6000
ULVAC爱发科 水晶振荡式成膜控制器 CRTM-6000ULVAC爱发科 水晶振荡式成膜控制器 CRTM-6000
- 型号: CRTM-6000
ULVAC爱发科 水晶振荡式成膜控制器 CRTM-6000ULVAC爱发科 水晶振荡式成膜控制器 CRTM-6000
ULVAC爱发科 水晶振荡式成膜控制器 CRTM-6000
Film thickness/rate resolution | 0.041 A (5 MHz) 0.029 A (6 MHz) |
Film thickness display range / display resolution/td> | 0.000~99.99 μm(0.000~999.9 kÅ) |
Deposition rate display range / display resolution | 0.01~99.99 nm/s(0.1~999.9 Å/s) |
Supported sensor frequency | 5MHz, 6MHz |
Number of sensors that can be attached | Single sensor::2(The simultaneous measurement cannot be done. It is a switch type. ) Multi sensor:1 |
Sampling rate | 125ms |
Number of multilayer film layers supported | 99 layers |
Number of deposition programs | 99 |
Digital I/O | Input : 12channels programmable Output : 12channels programmable |
Analog outputs | 3ch programmable |
External dimensions W×D×H | 240mm x 350mm x 99mm |