ULVAC爱发科 真空角阀 双作用气缸型 VLPーSA040KF
ULVAC爱发科 真空角阀 双作用气缸型 VLPーSA040KFULVAC爱发科 真空角阀 双作用气缸型 VLPーSA040KF
- 型号: VLPーSA040KF
ULVAC爱发科 真空角阀 双作用气缸型 VLPーSA040KFULVAC爱发科 真空角阀 双作用气缸型 VLPーSA040KF
ULVAC爱发科 真空角阀 双作用气缸型 VLPーSA040KF
Model | VLP-SA |
Maximum allowable differential pressure on valve plate (Positive pressure/counter pressure) MPa | 0.10 |
Maximum allowable differential pressure in opening direction (Positive pressure/counter pressure) MPa | 0.10 |
Plate seal | O-ring |
Feedthrough | O-ring |
Actuation | Double-acting cylinder |
External leak rate*1 Pa・m3/s | ≦1.0E-10 |
Internal leak rate*1 Pa・m3/s | ≦1.0E-10 |
Operating pressure range (absolute pressure) Pa | Atm. ~ 1.0E-5 |
Bakeout temperature (when stopping)*2 ℃ | Body:150*3, actuation:70 (Indicator: 60) |
Operating ambient temperature ℃ | 5~70 |
Fluid temperature ℃ | 5~70 |
Heating & cooling speed ℃/h | ≦30 |
Operating ambient | Non-corrosive |
Fluid | Non-corrosive |
Compressed air to cylinder MPaG | 0.40 ~ 0.60 |
Warranted operation cycle*4 | 100,000 |
Orientation | No limitation |
Position indicator | Optional (sell separately) |
Material of major parts (Vacuum side) | Stainless steel 304 |
Material of major parts (Atmosphere side) | Stainless steel 304, Aluminum-6061 (anodized aluminum) |
Bellows material | ー |
Seal material (Vacuum side) | FKM |
Grease (Vacuum side) | Fluorine grease |
Attachment for lifting | None*5 |
RoHS | Complied |